Oxalyl fluoride explained

Oxalyl fluoride is the organofluorine compound with the formula (COF)₂. It is a fluorinated derivative of oxalic acid. This colorless liquid is prepared by reaction of sodium fluoride with oxalyl chloride.^[1]

Oxalyl fluoride is being investigated for use in etching as a replacement for compounds which have the liability of high global warming potential.^{[2] [3]}

See also

• Oxalyl chloride
• Oxalyl bromide
• Dioxane tetraketone
• Oxalyl

Notes and References

1. 10.1021/jo01081a050. Synthesis of Fluorides by Metathesis with Sodium Fluoride. C. W. Tullock, D. D. Coffman. J. Org. Chem.. 1960. 25. 11. 2016–2019.
2. http://www.freepatentsonline.com/6635185.html Method of etching and cleaning using fluorinated carbonyl compounds
3. Evaluation of Oxalyl Fluoride for a Dielectric Etch Application in an Inductively Coupled Plasma Etch Tool. J. Electrochem. Soc.. 148. 3. G141–G149. 2001. Simon Karecki . Ritwik Chatterjee . Laura Pruette . Rafael Reif . Terry Sparks . Laurie Beu . Victor Vartanian . Konstantin Novoselovc . amp . 10.1149/1.1348263. 2001JElS..148G.141K.