TSOM explained

Through-Focus Scanning Optical Microscopy (TSOM) is an imaging method that produces nanometer-scale three-dimensional measurement sensitivity using a conventional bright-field optical microscope. TSOM has been introduced and maintained by Ravikiran Attota[1] at NIST. It was given an R&D 100 Award in 2010.[2] In the TSOM method a target is scanned through the focus of an optical microscope, acquiring conventional optical images at different focal positions. The TSOM images are constructed using the through-focus optical images. A TSOM image is unique under given experimental conditions and is sensitive to changes in the dimensions of a target in a distinct way, which is very well applicable in nanoscale dimensional metrology. The TSOM method is alleged to have several nanometrology[3] [4] [5] [6] [7] [8] applications ranging from nanoparticles to through-silicon-vias (TSV).

The National Institute of Standards and Technology, USA, produced a short on the TSOM method.

Notes and References

  1. Web site: Dr. Ravikiran Attota . 2017-07-13 . 2016-06-16 . https://web.archive.org/web/20160616183517/http://www.nist.gov/pml/div683/grp03/rattota.cfm . dead .
  2. Web site: Research & Development World.
  3. Web site: Nanoscale Measurements With TSOM* Optical Method . Ravikiran . Attota . www.nist.gov.
  4. Web site: Ravikiran Attota . Ronald G. Dixson . Andras E. Vladár . Through-focus scanning optical microscopy . www.spiedigitallibrary.org. 2011-06-01 . 10.1117/12.884706.
  5. Attota . R. . Bunday . B. . Vartanian . V. . 2013 . Critical dimension metrology by through-focus scanning optical microscopy beyond the 22 nm node . Appl. Phys. Lett. . 102 . 22. 222107 . 10.1063/1.4809512 . 2013ApPhL.102v2107A . free .
  6. Attota . R. . Dixson . R.G. . 2014 . Resolving three-dimensional shape of sub-50 nm wide lines with nanometer-scale sensitivity using conventional optical microscopes . Appl. Phys. Lett. . 105 . 4 . 043101 . 10.1063/1.4891676 . 2014ApPhL.105d3101A . free .
  7. Attota . R. . Kavuri . P.P. . Kang . H. . Kasica . R. . Chen . L. . 2014 . Nanoparticle size determination using optical microscopes . Appl. Phys. Lett. . 105 . 16. 163105 . 10.1063/1.4900484 . 2014ApPhL.105p3105A . free .
  8. Kang . H. . Attota . R. . Tondare . V. . Vladar . A.E. . Kavuri . P. . 2015 . A method to determine the number of nanoparticles in a cluster using conventional optical microscopes . Appl. Phys. Lett. . 107 . 10. 103106 . 10.1063/1.4930994 . 2015ApPhL.107j3106K .

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