Propylene glycol methyl ether acetate explained

Propylene glycol methyl ether acetate (PGMEA, 1-methoxy-2-propanol acetate) is a P-type glycol ether used in inks, coatings, and cleaners. It is sold by Dow Chemical under the name Dowanol PMA,[1] by Shell Chemical under the name methyl proxitol acetate,[2] [3] and by Eastman under the name PM Acetate.[4]

In the semiconductor industry, PGMEA is a commonly used solvent, primarily for the application of surface adherents such as Bis(trimethylsilyl)amine (HMDS) on silicon wafers.[5] The compound is often the most abundant airborne, molecular contamination (AMC) in semiconductor cleanrooms,[6] due to its evaporation into ambient air.

Notes and References

  1. http://www.dow.com/scripts/litorder.asp?filepath=oxysolvents/pdfs/noreg/110-00588.pdf
  2. Web site: Archived copy . 2014-08-01 . dead . https://web.archive.org/web/20140808050817/http://s00.static-shell.com/content/dam/shell/static/chemicals/downloads/responsible-energy/methylproxitol-pgmemethylproxitolacetatepgmeaproductstewardships.pdf . 2014-08-08 .
  3. Web site: Shell Glycol Ethers and Acetates.
  4. Web site: Eastman EastaPure PM Acetate. 23 September 2019. Eastman Chemical Company. 23 September 2019.
  5. Web site: HMDS primer (hexamethyldisilazane), DEATS and PGMEA.
  6. Web site: Archived copy . 2016-07-29 . https://web.archive.org/web/20161003181247/http://www.balazs.com/file/otherelement/pj/1_amc_guidelines_rev2.34642.pdf . 2016-10-03 . dead .

This article is licensed under the GNU Free Documentation License. It uses material from the Wikipedia article "Propylene glycol methyl ether acetate".

Except where otherwise indicated, Everything.Explained.Today is © Copyright 2009-2024, A B Cryer, All Rights Reserved. Cookie policy.