Multilayer soft lithography explained

Multilayer soft lithography (MSL) is a fabrication process in which microscopic chambers, channels, valves and vias are molded within bonded layers of elastomer.[1]

Commercial PDMS stamps can mold materials such as optical adhesive in a sequential process to create the bonded layers.

See also

Notes and References

  1. Unger . Marc A. . Chou . Hou-Pu . Thorsen . Todd . Scherer . Axel . Quake . Stephen R. . 2000-04-07 . Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography . Science . en . 288 . 5463 . 113–116 . 10.1126/science.288.5463.113 . 10753110 . 2000Sci...288..113U . 0036-8075.

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