Ethylenediamine pyrocatechol explained

Ethylenediamine pyrocatechol (EDP), also known as ethylenediamine-pyrocatechol-water (EPW), is an anisotropic etchant solution for silicon.[1] A typical formulation consists of ethylenediamine, pyrocatechol, pyrazine and water. It is carcinogenic and very corrosive.[1] It is mainly used in research labs, and is not used in mainstream semiconductor fabrication processes.[1]

Notes and References

  1. https://web.archive.org/web/20070707082530/http://www.ee.washington.edu/research/microtech/cam/PROCESSES/PDF%20FILES/WetEtching.pdf Microfabrication:Wet-Etching