Burn-Jeng Lin Explained

Burn-Jeng Lin (; born 1942) is a Taiwanese electrical engineer.

Education

After graduating from National Taiwan University in 1963 with a degree in electrical engineering, Lin earned his doctorate in the same subject from Ohio State University in 1970.[1] [2]

Career

During his tenure at IBM, which began in 1970,[3] Lin became the first to propose immersion lithography, a technique that became viable in the 1980s.[4] [5] Lin left IBM to found his own company, Linnovation, Inc., in 1992. He began working for TSMC in 2000.[6] Lin was named an IEEE Fellow in 2003, and granted an equivalent honor by the SPIE. The next year, SPIE gave Lin the inaugural Frits Zernike Award.[7] In 2008, Lin was elected to membership of the United States National Academy of Engineering "for technical innovations and leadership in the development of lithography for semiconductor manufacturing."[8] Lin received the IEEE Cledo Brunetti Award and IEEE Jun-ichi Nishizawa Medal in 2009 and 2013 respectively.[2] [5] In 2014, Lin was named a member of Academia Sinica.[1] [7] Upon his retirement from TSMC, he was offered a position on the faculty of National Tsing Hua University.[7] [9]

Notes and References

  1. News: Burn J. Lin . 13 February 2023 . Academia Sinica.
  2. News: ECE Alum Burn Lin receives IEEE Jun-ichi Nishizawa Medal . 2 December 2018 . Ohio State University . 30 April 2013.
  3. Web site: Burn Lin: The 2023 SPIE Mozi Award . 2023-05-06 . spie.org.
  4. Burn J. Lin (1987). "The future of subhalf-micrometer optical lithography". Microelectronic Engineering 6, 31 - 51
  5. News: Handy . Jim . Father of Immersion Litho Receives Award . 2 December 2018 . Forbes . 26 June 2013.
  6. News: Biography: Burn J. Lin . 2 December 2018 . Semiconductor Research Corporation.
  7. News: Semiconductor Pioneer Burn Lin Joins NTHU . 2 December 2018 . National Tsing Hua University . 2016 . 3 December 2018 . https://web.archive.org/web/20181203010928/http://nthu-en.web.nthu.edu.tw/files/14-1902-106872,r4806-1.php?Lang=zh-tw . dead .
  8. News: Dr. Burn Jeng Lin . 2 December 2018 . United States National Academy of Engineering.
  9. News: TSMC Burn Lin Academic Salon . 2 December 2018 . 2016 . 3 December 2018 . https://web.archive.org/web/20181203055432/http://thoric.web.nthu.edu.tw/files/15-1893-104248,c11356-1.php?Lang=en . dead .

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